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High-Temperature Process Evaluation Product List

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Small Halogen-Compatible Furnace | High-Temperature Process Evaluation Using F-Series and Cl-Series Gases

Suppressing concerns about degradation and leaks of furnace materials due to corrosive gases, safely examining halogen atmosphere testing.

In high-temperature processes involving halogen gases (such as F and Cl series), common electric furnaces may face issues with corrosion and degradation of heaters, furnace materials, piping, and sealing materials. Particularly in surface treatment, etching, cleaning, and reaction evaluation using fluorine or chlorine gases, it is crucial to design equipment that includes corrosion resistance of furnace materials, exhaust and emission control, and gas leakage prevention. Our small halogen-compatible furnace is a test furnace designed to examine high-temperature processing using corrosive gases on a small scale. We can consider configurations tailored to applications, including corrosion-resistant materials, scrubber integration, interlocks, and safety equipment. **Features** - Compatible with halogen gas atmospheres such as F and Cl series - Consideration of furnace materials, piping, and sealing configurations for corrosive gases - Integration with scrubbers, gas detection, and emergency shutdown systems is possible - Pre-evaluation of temperature, gas concentration, and processing time in a small furnace - Support for process feasibility confirmation before mass production furnace introduction *For more details, please download the materials or contact us.*

  • Electric furnace
  • High-Temperature Process Evaluation

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